Cross-sectional atomic force microscope in scanning electron microscope
نویسندگان
چکیده
منابع مشابه
Characterization of Metallic Nanowires by Combining Atomic Force Microscope (AFM) and Scanning Electron Microscope (SEM)
A new experimental method is introduced in order to characterize the mechanical properties of metallic nanowires. An accurate mechanical characterization of nanowires requires simultaneous imaging using scanning electron microscope (SEM) and mechanical testing with an atomic force microscope (AFM). In this study, an AFM is located inside an SEM chamber in order to establish the visibility of th...
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the scanning electron microscope
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In atomic force microscopy (AFM), the dynamics and nonlinearities of its nanopositioning stage are major sources of image distortion, especially when imaging at high scanning speed. This chapter discusses the design and experimental implementation of an observer-based model predictive control (OMPC) scheme which aims to compensate for the effects of creep, hysteresis, cross-coupling, and vibrat...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
سال: 2014
ISSN: 2166-2746,2166-2754
DOI: 10.1116/1.4901565